JPS6246277Y2 - - Google Patents

Info

Publication number
JPS6246277Y2
JPS6246277Y2 JP1981186248U JP18624881U JPS6246277Y2 JP S6246277 Y2 JPS6246277 Y2 JP S6246277Y2 JP 1981186248 U JP1981186248 U JP 1981186248U JP 18624881 U JP18624881 U JP 18624881U JP S6246277 Y2 JPS6246277 Y2 JP S6246277Y2
Authority
JP
Japan
Prior art keywords
substrate
electrode
electrostatic bonding
pressure transducer
bonding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1981186248U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5892746U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP18624881U priority Critical patent/JPS5892746U/ja
Publication of JPS5892746U publication Critical patent/JPS5892746U/ja
Application granted granted Critical
Publication of JPS6246277Y2 publication Critical patent/JPS6246277Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP18624881U 1981-12-16 1981-12-16 半導体圧力変換器 Granted JPS5892746U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP18624881U JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Publications (2)

Publication Number Publication Date
JPS5892746U JPS5892746U (ja) 1983-06-23
JPS6246277Y2 true JPS6246277Y2 (en]) 1987-12-12

Family

ID=29988026

Family Applications (1)

Application Number Title Priority Date Filing Date
JP18624881U Granted JPS5892746U (ja) 1981-12-16 1981-12-16 半導体圧力変換器

Country Status (1)

Country Link
JP (1) JPS5892746U (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0636427B2 (ja) * 1983-02-04 1994-05-11 株式会社東芝 半導体圧力変換装置
JP2013002942A (ja) * 2011-06-16 2013-01-07 Honda Motor Co Ltd 力覚センサチップ

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54131892A (en) * 1978-04-05 1979-10-13 Hitachi Ltd Semiconductor pressure converter

Also Published As

Publication number Publication date
JPS5892746U (ja) 1983-06-23

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